Scanning probe microscope with improved probe tip mount
AssigneePSIA Corporation
InventorsJoonhyung Kwon, Young Seok Kim, Sang-il Park
Life of this patent
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Abstract
A scanning probe microscope uses two different scanners (also called “scanning stages”) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called “x-y scanner”) scans a sample in a plane (also called “x-y plane”), while the other scanner (called “z scanner”) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called “z direction”) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
Claims20
A scanning probe microscope comprising:
- a stationary frame;
- a first scanner attached to the stationary frame, and a sample chuck attached to the first scanner, the sample chuck being movable by the first scanner in a plane;
- a second scanner physically detached from the first scanner and attached to the stationary frame;
- a cantilever supported by the second scanner, and a probe tip attached to a free end of the cantilever, the cantilever being movable by the second scanner along a line perpendicular to the plane of movement of the sample chuck.
A microscope arrangement comprising:
- a scanner mounted on a stage, the scanner being limited to linear motion in the direction of motion of the stage;
- a cantilever supported by the scanner, the cantilever having a free end;
- and
- an objective lens supported by the stage, the lens having an axis parallel to the direction of motion of the stage.
A method for evaluating a sample, the method comprising:
- moving a probe tip attached to a free end of a cantilever in a first direction;
- moving a sample in a plane perpendicular to the first direction, without moving the probe tip;
- and
- measuring deflection of the cantilever during at least one of the acts of moving.
Dependencies are inferred from the claim text.