Method of detecting a pattern and an apparatus thereof
AssigneeHitachi Kokusai Electric Inc.
InventorsShogo Kosuge, Masaru Nogami, Kiyoshi Iyori
Life of this patent
Estimating the term…
Abstract
An alignment mark is sometimes undetectable even when part of it is visible with the eye. There is provided a pattern detecting method and an apparatus capable of detecting the alignment mark if part of it is visible. Thereby a position of the alignment mark can be detected. An image of a substantially whole of the alignment mark is registered as a representative image and besides at least one image of a part of the registered representative image is newly registered as a partial image. When any one of the registered representative image and the partial image is recognized. The pattern based on the alignment mark is detected. Thereby position coordinates can be recognized.
Claims15
An method of detecting a pattern in a pattern detecting apparatus, the apparatus comprising a table for fixing a substrate having a formed wiring pattern and an alignment mark, an imaging unit which images a predetermined point in said substrate, a signal processing unit which processes a video signal send by said imaging unit and a control unit which controls the action of said table, the method comprising steps of:
- imaging a first alignment mark as a reference by said imaging unit;
- registering a substantially whole alignment mark in said imaged first alignment mark and a part of alignment mark in said imaged first alignment mark;
- imaging a second alignment mark in said substrate to be inspected by said imaging unit;
- and
- detecting a position of said second mark from said imaged second alignment mark, based on any of said substantially whole alignment mark or at least a part of said imaged first alignment mark.
An apparatus which detects a pattern comprises:
- a table which fixes a substrate which includes an alignment mark, a wiring pattern being formed on said substrate;
- an imaging unit which images a predetermined position on said substrate;
- a storage unit which stores an video data;
- and
- a control unit which adjusts a range of view to be imaged by said imaging unit so as to a predetermined position in said substrate fixed on said table,
- wherein said imaging unit images a first alignment mark, as a reference, imaged by said imaging unit and a second alignment mark to be measured and registers substantially whole alignment mark of said imaged first alignment mark to said storage unit and a part of alignment mark in said first alignment mark;
- and
- wherein said signal processing unit has a function for detecting a position of said second alignment mark from said imaged second alignment mark based on any of a substantially whole alignment mark of said registered first alignment mark or at least a part of said imaged first alignment mark.
Dependencies are inferred from the claim text.