Polishing pad conditioning method and apparatus

A substrate polishing apparatus, comprising:

• a rotatable substrate containment head, the substrate containment head adapted to retain a substrate for polishing;
• a rotatable platen positioned to oppose the substrate containment head;
• a polishing pad coupled to the platen;
• and
• a polishing pad conditioning plate comprising a substantially flat rotatable plate having a first conditioning side, a second side, a perimeter and a center, the conditioning side comprising a plurality of channels defining a plurality of conditioning surfaces, the conditioning surfaces being adapted to condition the surface of a polishing pad, the conditioning surfaces having a leading edge and a trailing edge, the channels adapted to move debris and slurry based on the rotation of the substantially flat rotatable plate.

A method of conditioning a substrate polishing pad, comprising:

• providing a rotatable platen capable of rotating in a first direction and a second direction;
• providing a substrate polishing pad having a first side adapted to polish substrates and a second side adapted to engage the rotatable platen;
• providing a polishing pad conditioning plate comprising a substantially flat rotatable plate having a first conditioning side, a second side, a perimeter and a center, the conditioning side comprising a plurality of channels defining a plurality of conditioning surfaces, the conditioning surfaces being adapted to condition the surface of a polishing pad, the conditioning surfaces having a leading edge and a trailing edge, the channels adapted to move debris and slurry based on the rotation of the substantially flat rotatable plate, the second side adapted to couple with a polishing machine;
• placing the substrate polishing pad on the rotatable platen with the first side facing outward;
• rotating the platen and polishing pad;
• positioning the substantially flat rotatable plate such that the first side contacts the polishing surface of the polishing pad;
• and
• rotating the substantially flat rotatable plate.