Inhibition of titanium corrosion
AssigneeEKC Technology, Inc.
InventorsJerome Daviot, Stanley Affrossman, Douglas Holmes
Life of this patent
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Abstract
A composition for removing resist, polymeric material and/or etching residue from a substrate comprising titanium or an alloy thereof, the composition comprising hydroxylamine or a derivative thereof and at least one compound having the general formula (I) wherein: R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3; and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy. 1
Claims26
A composition for removing resist, polymeric material and/or etching residue from a substrate comprising titanium or an alloy thereof, the composition comprising hydroxylamine or a derivative thereof and at least one compound having the general formula (I) as shown below:
- 7
- wherein:
- R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3;
- and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy.
A composition as claimed in any one of the preceding claims wherein the hydroxylamine is provided in an aqueous solution.
A composition as claimed in any one of the preceding claims further comprising a solvent which is miscible with the hydroxylamine or derivative thereof.
A composition as claimed in claim 8 or claim 0.9 wherein the remaining balance consists of a solvent selected from one or both of water and/or dimethyl sulfoxide.
A method of inhibiting corrosion of a substrate comprising titanium or an alloy thereof, the method comprising contacting the substrate with one or more compounds selected from those having the general formula (I) as shown below:
- 8
- wherein:
- R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3;
- and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy.
Use in a composition for removing resist, polymeric material and/or etching residue from a substrate, which substrate comprises titanium or an alloy thereof of one or more compounds selected from compounds having the general formula (I) as shown below:
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- wherein:
- R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2 or 3;
- and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy.
Use as a corrosion inhibitor in a composition for removing resist, polymeric material and/or etching residue from a substrate, which substrate comprises titanium or an alloy thereof of one or more compounds selected from compounds having the general formula (I) as shown below:
- 10
- wherein:
- R1 and R3 are each independently selected from H, OH, CO2H, halogen, C1-C3 alkyl, C1-C3 alkoxy or (CH2)nOH wherein n is 1, 2, or 3;
- and R2 is selected from C9-C16 alkyl, or C9-C16 alkoxy.
Dependencies are inferred from the claim text.