Optical waveguide and method of manufacturing the same, circuit board, optical module, and optical transfer apparatus
AssigneeSeiko Epson Corporation
InventorTsuyoshi Kaneko
Life of this patent
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Abstract
To provide an optical waveguide in which the mounting position, form, and size are favorably controlled, and a method of manufacturing the same an optical waveguide includes discharging a liquid material onto a substrate to form an optical waveguide precursor and hardening the optical waveguide precursor to form an optical waveguide.
Claims30
A method of manufacturing an optical waveguide, comprising:
- (a) forming a convex part on a substrate;
- (b) discharging droplets onto an upper surface of the convex part to form a precursor of an optical waveguide part;
- and
- (c) hardening the precursor to form an optical waveguide part.
A method of manufacturing an optical waveguide, comprising:
- (a) forming a first convex part on a substrate;
- (b) forming a second convex part on the substrate in parallel with the first convex part;
- (c) discharging first droplets onto an upper surface of the first convex part to form a precursor of an optical waveguide part;
- (d) hardening the precursor of the optical waveguide part to form the optical waveguide part;
- (e) forming a precursor for a covering layer that is formed on an upper surface of the second convex part and covers the optical waveguide part;
- and
- (f) hardening the precursor for a covering layer to form the covering layer with a lower refractive index than the optical waveguide part.
The method of manufacturing an optical waveguide according to claim 14, in (e), the precursor for a covering layer being formed by discharging second droplets onto the optical waveguide part and the upper surface of the second convex part.
An optical waveguide, comprising:
- a convex part provided on a substrate;
- and
- an optical waveguide part provided on the convex part.
An optical waveguide, comprising:
- a first convex part provided on a substrate;
- an optical waveguide part provided on an upper surface of the first convex part;
- a second convex part disposed in parallel with the first convex part;
- and
- a covering layer that covers an optical waveguide part and is provided in part on an upper surface of the second convex part.
Dependencies are inferred from the claim text.