Integrated compound nano probe card and method of making same
AssigneeIndustrial Technology Research Institute
InventorsHorng-Jee Wang, Ya-Ru Huang, Min-Chieh Chou
Life of this patent
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Abstract
An integrated compound nano probe card is disclosed to include a substrate layer having a front side and a back side, and compound probe pins arranged in the substrate layer. Each compound probe pin has a bundle of aligned parallel nanotubes/nanorods and a bonding material bonded to the bundle of aligned parallel nanotubes/nanorods and filled in gaps in the nanotubes/nanorods. Each compound probe pin has a base end exposed on the back side of the substrate layer and a distal end spaced above the front side of the substrate layer.
Claims27
A probe card fabrication method comprising the steps of:
- (1) preparing a substrate having a porous surface;
- (2) covering a catalyst material on the porous surface of said substrate subject to a predetermined pattern, so as to form a plurality of catalyst strips on the porous surface of said substrate, said catalyst strips each having a plurality of catalyst elements,
- (3) exposing said catalyst strips to an environment containing a predetermined gas and having a temperature above room temperature, for enabling said catalyst elements to react with said gas so as to form bundles of aligned parallel nanotubes/nanorods at said catalyst strips;
- and
- (4) covering said bundles of aligned parallel nanotubes/nanorods by a bonding material, enabling said bonding material to pass into gaps in said aligned parallel nanotubes/nanorods.
A compound nano probe pin comprising a bundle of aligned parallel nanotubes/nanorods, and a bonding material bonded to said bundle of aligned parallel nanotubes/nanorods and filled in gaps in said nanotubes/nanorods.
17 The compound nano probe pin as claimed in claim 14, wherein said bonding material is rubber.
A probe card comprising:
- a substrate layer having a front side and a back side;
- and
- a plurality of compound probe pins arranged in said substrate layer, said compound probe pins each having a bundle of aligned parallel nanotubes/nanorods and a bonding material bonded to said bundle of aligned parallel nanotubes/nanorods and filled in gaps in said nanotubes/nanorods, said compound probe pins each having a base end exposed on the back side of said substrate layer and a distal end spaced above the front side of said substrate layer.
A probe pin set comprising:
- a substrate having a porous surface;
- and
- a plurality of pins arranged in said porous surface of said substrate subject to a predetermined pattern and extended in direction substantially perpendicular to said porous surface of said substrate, said pins each having a bundle of aligned parallel nanotubes/nanorods and a bonding material bonded to said bundle of aligned parallel nanotubes/nanorods and filled in gaps in said nanotubes/nanorods.
Dependencies are inferred from the claim text.