Birefringence-free passive optical component
OwnerAxel Klekamp, Wiltraud Wischmann +1inventors
InventorsAxel Klekamp, Wiltraud Wischmann, Arnd Kilian
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Abstract
The production of optical waveguides on waveguide bases which, for example, are formed from a correspondingly structured buffer layer, reduces the birefringence which occurs owing to thermally induced stresses during the glass production process. Therefore, the concentration of dopants (for example boron atoms) in the cladding layer can be reduced to achieve a birefringence-free optical component as complete adaptation of the thermal coefficient of expansion of the glass to that of the silicon substrate is no longer necessary. This has the enormous advantage that optical components, which comprise optical waveguides of this type, remain stable relative to external influences for a long time.
Claims11
Optical waveguide which is structured in a core layer which is located on a buffer layer and is covered by a cladding layer, the buffer layer being applied to a substrate, characterised in that a strip-shaped waveguide base of thickness d is formed between buffer layer and optical waveguide, which waveguide base is completely covered laterally by the cladding layer and has the optical waveguide structured thereon, and the cladding layer consists of a vitreous material doped with foreign atoms to impart a birefringence-free property to the optical waveguide.
Process for producing an optical waveguide in which a buffer layer is applied to a substrate, to which buffer layer a core layer is applied, the optical waveguide being structured into the core layer, characterised in that a strip-shaped waveguide base of thickness d is formed from the buffer layer below the optical waveguide, and in that subsequently both the optical waveguide and the portion of the waveguide base not covered by the waveguide is covered by a cladding layer.
Process for producing an optical waveguide in which a first buffer layer is applied to a substrate, to which first buffer layer a core layer is applied, the optical waveguide being structured into the core layer, characterised in that a further buffer layer is applied to the first buffer layer before the core layer is applied, from which further buffer layer a strip-shaped waveguide base of thickness d is formed, and in that subsequently both the optical waveguide and the portion of the waveguide base not covered by the waveguide is covered by a cladding layer.
Dependencies are inferred from the claim text.