Method for fabricating polymeric optic waveguide grating
AssigneeLG Electronics Inc.
InventorsKi Dong Lee, Sung Eun Lee
Life of this patent
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Abstract
Disclosed is a fabrication method of a polymeric optic waveguide grating, the method including: forming a core layer of a polymeric material on a substrate; irradiating an ultraviolet ray to the core layer to pre-cure a surface of the core layer; pressing the pre-cured core layer at a predetermined pressure by using a master having a grating pattern; irradiating the ultraviolet ray in a state that the master is pressed, to fully cure the core layer; and separating the master from the fully cured core layer to form a grating pattern on the core layer.
Claims17
A method for fabricating a polymeric optic waveguide grating, the method comprising:
- forming a core layer of a polymeric material on a substrate;
- irradiating an ultraviolet ray to the core layer to pre-cure a surface of the core layer;
- pressing the pre-cured core layer at a predetermined pressure by using a master having a grating pattern;
- irradiating the ultraviolet ray in a state that the master is pressed, to fully cure the core layer;
- and
- separating the master from the fully cured core layer to form a grating pattern on the core layer.
A method for fabricating a polymeric optic waveguide grating, the method comprising the step of performing an imprint lithography process using a master having a grating pattern for a polymeric film formed on a substrate, to form a grating on the polymeric film.
A polymeric optic device having a grating, which is formed by a method for fabricating a polymeric optic waveguide grating, the method comprising the steps of:
- forming a core layer of a polymeric material on a substrate;
- irradiating an ultraviolet ray to the core layer to pre-cure a surface of the core layer;
- pressing the pre-cured core layer at a predetermined pressure by using a master having a grating pattern;
- irradiating the ultraviolet ray in a state that the master is pressed, to fully cure the core layer;
- and separating the master from the fully cured core layer to form a grating pattern on the core layer.
Dependencies are inferred from the claim text.