Capacitive differential pressure sensor

Differential pressure sensor comprising

• a first ceramic body (20a) with a first membrane bed (22a),
• a second ceramic body (20b) with a second membrane bed (22b),
• a membrane (30), which is arranged between the two bodies (20a,20b) and separates the two oppositely situated membrane beds (22a, 22b) from one another,
• a first measurement capacitor K1 for producing a first measurement signal S1 with a first electrode pair (40a, 40b), which is present as one electrode on the membrane bed (22a) and one electrode on the membrane (30),
• a second measurement capacitor K2 for producing a second measurement signal S2 with a second electrode pair (41a, 41b), which is present as one electrode on the membrane bed (22b) and one electrode on the membrane (30),
• an electronic circuit
• which determines from the two measurement signals S1 and S2 the capacitances CK1, CK2 of the two measurement capacitors K1, K2,
• which produces a signal SIG1=1/CK1−1/CK2, which is essentially proportional to the value of the pressure difference DP and which depends on the nominal pressure NP,
• which produces a signal SIG2=1/CK1+1/CK2, which is proportional to the value of the nominal pressure NP,
• wherein the dependence of the measurement value DP on the nominal pressure NP is corrected with the help of the signal SIG2.