Weighted least-square interferometric measurement of multiple surfaces

A system for producing mapping profiles of transparent objects having a plurality of reflective surfaces including in combination:

• a tunable coherent light source;
• an unequal path length interferometer having a reference surface and adapted to support a transparent object having a plurality of reflective surfaces to receive light from the tunable light source and to produce simultaneous optical interferograms;
• a recorder positioned to simultaneously record the multiple optical interferograms for each of the plurality of reflective surfaces of the transparent object;
• and
• computer means coupled with the tunable light source for changing the wavelength of light emitted by the light source and further coupled with the recorder for extracting phases of each of the interferograms for each of the plurality of reflective surfaces to produce a phase map for each interferogram using a weighted least-square algorithm in the computer.