Method and apparatus for forming substrate for semiconductor or the like

An apparatus for specifying a processing state and/or a finishing state of a processing target, comprising:

• a monitor light generation device which can irradiate with a monitor light ray at least a position of a processing target which is irradiated with a light energy which can perform predetermined processing or finishing;
• a light sensing mechanism which detects a reflected light ray generated from the processing target irradiated with the monitor light ray, and detects electrons corresponding to the reflected light ray and/or a light ray obtained by converting the electrons corresponding to the reflected light ray;
• and
• a reflected light measurement mechanism which measures a temporal change in an angle distribution of an intensity of the reflected light ray detected by the light sensing mechanism.

An apparatus for determining characteristics of a thin film, comprising:

• a monitor light irradiator which irradiates a monitor light ray having a polarization light in a direction of the polarization light is a predetermined direction, and the monitor light ray is condensed on the thin film through a lens system;
• a first light measurement device which receives a reflected light ray of the monitor light ray from the thin film, has a first light sensing surface having a plurality of substantially continuous light sensing elements, and measures a temporal change in an angle distribution of an intensity of the reflected light ray;
• and
• a second light measurement device which receives a reflected light ray of the monitor light ray from the thin film, has a second light sensing surface having a plurality of substantially continuous light sensing elements each arranged orthogonal to the first light measurement device, and measures a temporal change in an angle distribution of an intensity of the reflected light ray.

An apparatus for determining characteristics of a thin film, comprising:

• a monitor light irradiator which irradiates a monitor light ray having at least one of the S polarization light and the P polarization light, and the monitor light ray is condensed on the thin film through a lens system;
• a first light measurement device which receives a reflected light ray of the monitor light ray from the thin film, has a first light sensing surface having a plurality of substantially continuous light sensing elements, and measures a temporal change in an angle distribution of an intensity of the reflected light ray;
• and
• a second light measurement device which receives a reflected light ray of the monitor light ray from the thin film, has a second light sensing surface having a plurality of substantially continuous light sensing elements each arranged orthogonal to the first light measurement device, and measures a temporal change in an angle distribution of an intensity of the reflected light ray.

A method for determining characteristics of a thin film, comprising:

• irradiating with a monitor light ray includes a polarization light in a direction of the polarization is a predetermined direction which is irradiated with a light energy which can perform predetermined processing or finishing;
• detecting a reflected light ray generated from the processing target by the polarization light of the monitor light ray by a light sensing mechanism having a plurality of substantially continuous light sensing elements;
• and
• measuring a temporal change in an angle distribution of an intensity of the reflected the light detected by the light sensing mechanism.

A method for determining characteristic of thin film, comprising:

• irradiating with a monitor light ray includes a polarization light in a direction of the polarization is a predetermined direction which is irradiated with a light energy which can perform predetermined processing or finishing;
• detecting a reflected light ray generated from the processing target by the polarization light of the monitor light ray by a light sensing mechanism having a plurality of substantially continuous light sensing elements;
• measuring a temporal change in an angle distribution of an intensity of the reflected the light detected by the light sensing mechanism;
• and
• calculating a temporal change in a refractive index and an extinction coefficient of the processing target based on the measured temporal change in the angle distribution of the intensity of the reflected light.

A method for determining characteristic of thin film, comprising:

• irradiating with a monitor light ray includes at least one of the S polarization light and the P polarization light orthogonal the each of polarization direction which is irradiated with a light energy which can perform predetermined processing or finishing;
• detecting a reflected light ray generated from the processing target by the first polarization light of the monitor light ray by a first light sensing mechanism having a plurality of substantially continuous light sensing elements;
• detecting a reflected light ray generated from the processing target by the second polarization light of the monitor light ray by a second light sensing mechanism having a plurality of substantially continuous light sensing elements arranged orthogonal to the light sensing elements of the first light sensing mechanism;
• and
• measuring a temporal change in an angle distribution of an intensity of the reflected the first and second lights each detected by the first and the light sensing mechanisms.

A method for determining characteristic of thin film, comprising:

• irradiating with a monitor light ray includes at least one of the S polarization light and the P polarization light orthogonal the each of polarization direction which is irradiated with a light energy which can perform predetermined processing or finishing;
• detecting a reflected light ray generated from the processing target by the first polarization light of the monitor light ray by a first light sensing mechanism having a plurality of substantially continuous light sensing elements;
• detecting a reflected light ray generated from the processing target by the second polarization light of the monitor light ray by a second light sensing mechanism having a plurality of substantially continuous light sensing elements arranged orthogonal to the light sensing elements of the first light sensing mechanism;
• measuring a temporal change in an angle distribution of an intensity of the reflected the first and second lights each detected by the first and the light sensing mechanisms;
• and
• calculating a temporal change in a refractive index and an extinction coefficient of the processing target based on the measured temporal change in the angle distribution of the intensity of the reflected first and second lights.