Laser beam positioning device for laser machining, apparatus

A laser beam positioning device for a laser processing equipment comprising:

• a stage where a work piece is placed;
• a laser oscillator that emits a laser beam;
• an optical unit that guides the laser beam so that the laser beam irradiates the work piece placed on the stage;
• a beam scanning unit that scans the laser beam;
• a measurement unit that measures a processed position on the work piece at which the laser processing has been performed;
• and
• a control unit that calculates the command value from coordinates of the processed position and coordinates of a target position, wherein
• the control unit calculates an unknown parameter matrix by dividing a surface of the work piece into a plurality of areas, applying a weight of one to an area with the target position, and applying a weight less than one to an area without the target position, the unknown parameter matrix optimally determining the command value to guide the laser beam onto the target position on the work piece.

A laser beam positioning device for a laser processing equipment comprising:

• a stage where a work piece is placed;
• a laser oscillator that emits a laser beam;
• an optical unit that guides the laser beam so that the laser beam irradiates the work piece placed on the stage;
• a beam scanning unit that scans the laser beam;
• a measurement unit that measures a processed position on the work piece at which the laser processing has been performed;
• and
• a control unit that calculates the command value from coordinates of the processed position and coordinates of a target position, wherein
• the control unit calculates an unknown parameter matrix by using a forgetting factor k (0≦k≦1) that changes the amount of weighting to the coordinates of the processed position and the command value based on which the beam scanning unit performed the processing at the processed position, according to the time order of information of the command value, the unknown parameter matrix optimally determining the command value to guide the laser beam onto the target position on the work piece.