Optical characteristic measuring apparatus, method and recording medium
AssigneeAdvantest Corporation
InventorsKenichi Nakamura, Eiji Kimura, Takahisa Tomi
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AssigneeAdvantest Corporation
InventorsKenichi Nakamura, Eiji Kimura, Takahisa Tomi
Estimating the term…
The object of the present invention is to provide apparatuses that enable to enlarge the range of modulation frequencies that modulate the variable wavelength light generated by the light source without prejudice to the measurement of optical characteristics. In order to achieve said object, a modified modulation frequency computing section 44 for computing modified modulation frequencies fi by multiplying by the initial modulation frequency fmin the value obtained by dividing the given phase value π by the phase difference between the first phase φmin_i of the transmitted light resulting from the transmission through the DUT 30 of the incident light of the first wavelength λi modulated by the initial modulation frequency fmin and the second phase φmin_i+1 of the transmitted light resulting from the transmission through the DUT 30 of the incident light of the second wavelength λi+1 modulated by the initial modulation frequency fmin, and a modified modulation frequency setting section 46 for setting the modified modulation frequency fi as the frequency of the modulating signal are included so that the frequencies for modulating the incident light may be wider in range than the initial modulation frequency fmin and that the phase difference between φi and φi+1 may be kept at a value equal to or below the given phase value π, and thus the precision of measuring phase differences can be enhanced.
An apparatus for measuring the characteristics of device under test that transmits light comprising:
A method for measuring the characteristics of device under test that transmits light comprising:
A computer-readable medium having a program of instructions for execution by the computer to perform a characteristics measuring process for measuring characteristics of device under test that transmits light, said characteristics measuring process comprising:
Dependencies are inferred from the claim text.