Piezoelectric ceramics and method of manufacturing the same, actuator and method of manufacturing the same, printing head and ink jet printer
AssigneeKYOCERA Corporation
InventorsShuzo Iwashita, Shinichi Handa
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Abstract
The present invention provides piezoelectric ceramics having a thickness of 100 μm or less, surface flatness of 20 μm or less and maximum surface uneveness of 3 μm or less in arbitrary surface region, wherein in-plane variation in dielectric constant is 5% or less of an average dielectric constant. The piezelectric ceramics are applied to an actuator used for a painting head because of small surface flatness and less in-plane variation in piezoelectric constant.
Claims30
Piezoelectric ceramics having a thickness of 100 μm or less, suface flatness of 20 μm or less and maximum surface unevenness of 3 μm or less, wherein in-plane variation in dielectric constant is 5% or less of an average dielectric constant.
A method of manufacturing piezoelectric ceramics, which comprises firing green compact comprising a piezoelectric ceramic powder while contacting with the surface of a supporting member whose surface having porosity of 5% or less and flatness 20 μm or less.
An actuator comprising a piezoelectric substrate comprising a plurality of piezoelectric ceramics layers and a plurality of displacement elements provided on the surface of the piezoelectric substrate, and the displacement elements comprises a pair of electrodes and a piezoelectric layer interposed between the electrodes, wherein a thickness of the piezoelectric ceramics layers and the piezoelectric layer is 50 μm or less, a total thickness is 100 μm or less, and in-plane variation in total thickness are 10% or less.
A method of manufacturing an actuator, which comprises:
- a mixing step of a piezoelectric ceramic powder having an average grain size of 1 μm or less and an organic binder component to prepare a slurry for formation of a tape,
- a forming step of forming the slurry for formation of a tape obtained in the mixing step into a green sheet by a tape forming process,
- a pressing step of pressing the green sheet obtained in the forming step,
- a laminating step of applying electrodes on the green sheet obtained in the pressing step and laminated the green sheets to obtain a laminated green compact, and
- a firing step of firing the laminated green compact obtained in the laminating step.
A method of manufacturing an actuator, which comprises firing a plurality of green compacts comprising a piezoelectric ceramic powder and a plurality of supporting members which are laminated mutually, and each supporting member has the surface which has porosity at surface portion of 1% or less and flatness of 20 μm or less.
Dependencies are inferred from the claim text.