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US 2004/0104976 A1Published application
Pressure chamber of a piezoelectric ink jet print head and fabrication method thereof
OwnerChen-Hua Lininventor
Life of this patent
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Abstract
A pressure chamber of a piezoelectric ink jet print head and a fabrication method thereof. The pressure chamber comprises a substrate, a concave chamber formed on the substrate, having an opening of a relatively large sectional area and a bottom of a relatively small sectional area, a vibrating plate formed above the concave chamber, and a piezoelectric unit on the vibrating plate.
Claims16
A pressure chamber of a piezoelectric ink jet print head, comprising:
- a substrate;
- a concave chamber formed on the substrate, having an opening of a relatively large sectional area and a bottom of a relatively small sectional area;
- a vibrating plate formed above the concave chamber;
- and
- a piezoelectric unit on the vibrating plate.
2 more elements
A fabrication method for a pressure chamber of a piezoelectric ink jet print head, comprising steps of:
- providing a substrate;
- forming a concave chamber on the substrate to serve as the pressure chamber, wherein the concave chamber has an opening of a relatively large sectional area and a bottom of a relatively small sectional area;
- forming a vibrating plate above the concave chamber;
- and
- forming a piezoelectric unit on the vibrating plate.
2 more elements
Dependencies are inferred from the claim text.