Liquid-jet head, method of manufacturing the same and liquid-jet apparatus

Abstract

A liquid-jet head, a manufacturing method thereof and a liquid-jet apparatus are provided, the liquid-jet head capable of preventing damage to a vibration plate, easily and surely preventing damage to a piezoelectric element attributable to an external environment, simplifying a manufacturing process and improving a withstand voltage of the piezoelectric element. In the liquid-jet head including a passage-forming substrate 10 in which a pressure generating chamber 12 communicating with a nozzle orifice 21 is defined; and a piezoelectric element 300 which is constituted of a lower electrode 60, a piezoelectric layer 70 and an upper electrode 80 and is provided on the passage-forming substrate 10 with vibration plates 50 and 60 interposed therebetween, the piezoelectric element 300 is made of a thin film directly formed on the vibration plates 50 and 60 by deposition and a lithography method without an adhesive agent interposed therebetween; a junction plate 30 is joined onto a draw-out wiring 90 drawn out of the piezoelectric element 300 on the piezoelectric element 300-facing side of the passage-forming substrate 10 with an insulating adhesive agent 122 interposed therebetween; only a side face of the piezoelectric element 300 is covered with an adhesion layer 121 made of an adhesive agent 122 joining the junction plate 30 so as not to expose at least the piezoelectric layer 80; and thus the piezoelectric element 300 is sealed.

Dependencies are inferred from the claim text.