Contact probe
AssigneeSumitomo Electric Industries, Ltd.
InventorsTsuyoshi Haga, Kazunori Okada
Life of this patent
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Abstract
A contact probe is fabricated by forming a resin mold with a cavity on a substrate having conductivity, and filling the cavity with metal through electroforming. The metal includes a cobalt-tungsten alloy. Alternatively, a cobalt-molybdenum alloy may be used instead of the cobalt-tungsten alloy. Alternatively, a contact probe can be made from nickel, cobalt or copper, and have a coat film of cobalt-tungsten alloy or cobalt-molybdenum alloy formed thereon to increase the abrasion resistance. A nickel-molybdenum alloy can be used instead of the cobalt-tungsten alloy or cobalt-molybdenum alloy.
Claims15
A contact probe fabricated by forming a resin mold on a substrate having conductivity, and filling a cavity of said resin mold with metal through electroforming, wherein said metal is a nickel-manganese alloy, and an average crystal grain size of nickel is not more than 70 nm, and a preferred orientation of a nickel crystal by X-ray diffraction is (111) towards a deposition direction of electroforming.
A contact probe fabricated by forming a resin mold with a cavity on a substrate having conductivity, and filling said cavity with metal through electroforming, wherein said metal is an alloy for a probe selected from the group consisting of a cobalt-tungsten alloy, cobalt-molybdenum alloy, and nickel-molybdenum alloy.
A contact probe fabricated by forming a resin mold with a cavity on a substrate having conductivity, and filling said cavity with metal through electroforming, wherein a coat film of at least any alloy selected from the group consisting of a cobalt-tungsten alloy, cobalt-molybdenum alloy and nickel-molybdenum alloy is applied at a surface.
Dependencies are inferred from the claim text.