Probe card

Abstract

To prevent deformation of a component member such as a contactor unit to thereby perform a test under a satisfactory continuity condition. A probe card of the invention comprises a substrate body 100, a contactor unit 300 provided below the substrate body 100 for establishing an electrical contact with the subject to be tested as well as for establishing an electrical contact with the substrate body 100, a supporting means 400 for supporting the contactor unit 300 from below with elastic force and parallelism adjusting screws 500 that come in contact with the contactor unit 300 from above in a vertical direction for adjusting a parallelism of the contactor unit 300. In particular, the supporting means 400 is configured to include a coil spring 420 interposed toward a vertical direction between a flange section 411 provided at the inside section of the support member 410 arranged below the substrate body 100 and a flange section 321 provided at the outside section of the contactor unit 300.

Dependencies are inferred from the claim text.