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US 2004/0104731 A1Published application
Method of reliability testing
AssigneeInfineon Technologies AG
InventorRolf-P. Vollertsen
Life of this patent
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Abstract
A method of reliability testing is disclosed. A critical breakdown resistance of a device is determined. The test structure is subjected to stress conditions and electrically tested. The critical breakdown time of the test structure is recorded when the operating resistance of the test structure is equal or smaller than the critical breakdown resistance.
Claims30
A method of reliability testing comprising:
- providing a test structure;
- determining a critical breakdown resistance of the test structure, wherein the critical breakdown resistance of the test structure causes a circuit to fail;
- subjecting the test structure to stress conditions;
- repetitively determining an operating resistance of the test structure;
- and
- recording a critical breakdown time when the operating resistance of the test structure is equal or smaller than the critical breakdown resistance.
3 more elements
Dependencies are inferred from the claim text.