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US 2004/0104657 A1Published application
Apparatus for producing secondary electrons, a secondary electrode, and an acceleration electrode
AssigneeInfineon Technologies AG
InventorAndreas Kyek
Life of this patent
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Abstract
An apparatus includes a primary electrode and an acceleration electrode. The acceleration electrode or, alternatively, an additional secondary electrode contains a slot that extends obliquely through the acceleration electrode or through the secondary electrode. This measure allows secondary electrons to be produced in a highly effective manner.
Claims62
An apparatus for producing secondary electrons, comprising:
- at least one primary electrode for producing primary electrons;
- an acceleration electrode for accelerating the primary electrons;
- and
- a secondary electrode for producing secondary electrons when the accelerated primary electrons arrive.
1 more element
An apparatus for producing secondary electrons, comprising:
- at least one primary electrode for producing primary electrons;
- and
- a secondary electrode for accelerating the primary electrons;
- said secondary electrode formed with at least one aperture opening for preventing primary electrons from passing through.
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A secondary electrode configuration, comprising:
- a secondary electrode for producing secondary electrons;
- said secondary electrode formed with at least one aperture opening extending obliquely through said secondary electrode.
An acceleration electrode configuration, comprising:
- a acceleration electrode is formed with at least 100 openings.
Dependencies are inferred from the claim text.