Laminated piezoelectric element, actuator and printing head
AssigneeKYOCERA Corporation
InventorsYoshihiro Yuu, Shuzo Iwashita, Daisuke Takahashi
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Abstract
The laminated piezoelectric element having a thickness of 100 μm or less of the present invention comprises a laminate which comprises a plurality of piezoelectric ceramic layers 1, and electrodes 2,3 provided the surface and the inside of the laminate, wherein the electrode 2 comprises a silver-palladium alloy containing 71 to 99.9% by volume of silver and 0.1 to 29% by volume of palladium.
Claims12
A laminated piezoelectric element having a thickness of 100 μm or less, comprising a laminate which comprises a plurality of piezoelectric ceramic layers, and electrodes provided at least one of the surface and the inside of said laminate, wherein said electrodes comprises a silver-palladium alloy containing 71 to 99.9% by volume of silver and 0.1 to 29% by volume of palladium.
Dependencies are inferred from the claim text.