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AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Hiroyuki Tsuji, Kazumasa Kitamura, Nobuo Takahashi
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This is a method for manufacturing a comb teeth type piezoelectric actuator in which interlayer separation is hard to occur and even in case of comb teeth with slit width of 70 μm and below, and also in case of comb teeth with slits of three-dimensional shape, it is easily manufactured. A predetermined number of piezoelectric material green sheets 1 on which electrode films 2 are formed are prepared, and, by use of a punch 7 around which a stripper 9 is disposed and a die 8, slit apertures are formed in a first piezoelectric material green sheet 1a. The piezoelectric material green sheet 1a is pulled up by the stripper 9 without pulling up the punch 7 from the piezoelectric material green sheet 1a. Then, slit apertures are formed in a second piezoelectric material green sheet 1b by the punch 7, and in the same manner, without pulling up the punch 7 from the piezoelectric material green sheet 1b, two punched-out piezoelectric material green sheet 1a, 1b are pulled up by the stripper 9 and at the same time of the punch-out, the piezoelectric material green sheet is laminated. After repetition of this operation for a predetermined number of times, it is fired and integrated to form a comb teeth type piezoelectric actuator in which piezoelectric films are laminated.
A comb teeth type piezoelectric actuator in which a plurality of piezoelectric actuators, each comprising a plurality of piezoelectric layers, are aligned and allocated in the shape of comb teeth, wherein a side surface of each comb tooth comprises a fired surface.
A method for manufacturing a comb teeth type piezoelectric actuator in which a plurality of piezoelectric actuators, each comprising a plurality of piezoelectric layers, being aligned and allocated in the shape of comb teeth, comprising,
Dependencies are inferred from the claim text.