Method of separating a template from a substrate during imprint lithography
AssigneesThe University of Texas System, Board of Regents, UT System
InventorsByung Jin Choi, Sidlgata V. Sreenivasan, Stephen C. Johnson
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Abstract
Processes and associated devices for high precision positioning of a template an substrate during imprint lithography includes a calibration system with a course calibration stage and a fine orientation stage capable of maintaining a uniform gap between the template and substrate. The fine orientation stage includes a pair of flexure members having flexure joints for motion about a pivot point intersected by first and second orientation axes. Actuators lengthen or shorten to expand or contract the flexure members. Separation of the template is achieved using a peel-and-pull method that avoids destruction of imprinted features from the substrate.
Claims19
A method of separating a template extending in a first plane from a substrate extending in a second plane having an imprinting material disposed on a surface of said substrate, said method comprising:
- forming an oblique angle between said first plane and said second plane;
- and
- increasing a distance between said template and said substrate so that said template is spaced-apart from said substrate.
A method of separating a template from a substrate, with a first distance and a second distance defined therebetween, wherein said first distance is defined opposite to said second distance, said method comprising:
- increasing a first spacing between said substrate and said template so that a rate of change of said first distance is at a higher rate than a rate of change of said second distance;
- and
- increasing a second spacing between said substrate and said template so that a rate of change of said first distance and said second distance are substantially uniform.
A method of separating a template extending in a first plane from an imprinting layer extending in a second plane, said method comprising:
- forming an oblique angle between said first plane and said second plane to cause a wedge between said template and said imprinting layer at one end of a template-imprinting layer interface;
- and
- increasing a distance between said template and said imprinting layer so that said template is spaced-apart from said imprinting layer.
Dependencies are inferred from the claim text.