Back to results
US 2004/0104483 A1Published application
Plating a conductive material on a dielectric material
AssigneeIntel Corporation
InventorsMichael D. Goodner, Grant Kloster, Steven W. Johnston
Life of this patent
Estimating the term…
Abstract
A surface may be selectively coated with a polymer using an induced surface grafting or polymerization reaction. The reaction proceeds in those regions that are polymerizable and not in other regions. Thus, a semiconductor structure having organic regions and metal regions exposed, for example, may have the organic polymers formed selectively on the organic regions and not on the unpolymerizable or metal regions.
Claims25
A method comprising:
- forming a semiconductor substrate having a first exposed polymerizable dielectric surface and a second exposed unpolymerizable surface;
- and
- causing polymerization to occur selectively on the dielectric surface while avoiding polymerization on the unpolymerizable surface to form a polymer that selectively covers the dielectric surface.
A semiconductor structure comprising:
- a surface including an exposed polymerizable dielectric and an exposed unpolymerizable region;
- and
- a polymer selectively attached to said polymerizable dielectric to form a surface coating that selectively covers said polymerizable dielectric.
A method comprising:
- forming a semiconductor substrate having a dielectric surface and an exposed metal surface;
- causing polymerization to occur selectively on the dielectric surface while avoiding polymerization on the metal surface to form a polymer that selectively covers the dielectric surface;
- and
- using the polymer to form a copper diffusion barrier.
1 more element
A method comprising:
- forming a semiconductor substrate having a dielectric surface and a metallic surface;
- causing polymerization to occur selectively on the dielectric surface while avoiding polymerization on the metal surface to form a polymer that selectively covers the dielectric surface;
- and
- forming a copper seed layer using said polymer.
1 more element
Dependencies are inferred from the claim text.