Metal coated member and fabrication method thereof
AssigneeHitachi Maxell, Ltd.
InventorsHideo Daimon, Kohei Ugawa, Nobuhiro Umebayashi, Akito Sakemoto
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Abstract
A member having a metal layer is disclosed. The member is a silicon substrate or quartz substrate, for example, which is mainly composed of silicon or silicon oxide. A plurality of overhanging depressions are created on the surface of the member, and an anchor layer is formed thereon by filling the depressions. On the anchor layer is formed a metal film. The depressions are created by physical grinding followed by chemical etching. The anchor layer is NiP or NiB, for example. The metal layer is Au or AuSn, for instance.
Claims16
A member having a metal layer, the member mainly composed of one of silicon and silicon oxide, comprising:
- a plurality of overhanging depressions created on a surface of the member;
- an anchor layer formed by filling the depressions;
- and
- a metal layer formed on the anchor layer.
A method of fabricating a member having a metal layer, comprising:
- a step of creating a plurality of overhanging depressions on a surface of a member mainly composed of one of silicon and silicon oxide;
- a step of forming an anchor layer on the surface having the depressions by filling the depressions;
- and
- a step of forming a metal layer above the surface of the member with the anchor layer interposed therebetween.
A method of plating on a surface of a member, comprising:
- a step of creating a plurality of overhanging depressions on a surface of a member mainly composed of one of silicon and silicon oxide;
- and
- a step of forming a plating layer above the surface of the member, the step being subsequent to the step of creating depressions.
Dependencies are inferred from the claim text.