SiC-MISFET and method for fabricating the same

A SiC-MISFET comprising:

• a SiC body including a body portion containing an impurity of a first conductive type;
• a well region formed by introducing an impurity of a second conductive type into part of the SiC body other than the body portion;
• a channel layer which is formed so as to extend over the well region and the body portion of the SiC boby in the SiC body and contains an impurity of the first conductive type;
• a gate insulation film formed on the channel layer;
• a gate electrode formed on the gate insulation film;
• a source region which is formed in a region of the SiC body located adjacent to the channel layer so as to be in contact with the well region and contains an impurity of the first conductive type;
• a drain region formed in a region of the SiC body facing to the source region with the body portion interposed therebetween;
• and
• a partially heavily doped layer formed by implanting an impurity of the second conductive type into part of the SiC body located under the channel layer at a higher concentration than that in the well region.