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US 2004/0104353 A1Published application
One dimensional beam blanker array
AssigneeOregon Health & Science University
InventorC. Neil Berglund
Life of this patent
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Abstract
A beam blanker array includes a base plate, a plurality of conductor pads, and a ground plate. The conductor pads are arranged in a one-dimensional array on the base plate. The ground plate is coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate. Each of the plurality of conductor pads forms a beam blanker across the gap with the ground plate.
Claims100
An apparatus comprising:
- a base plate;
- a plurality of conductor pads arranged in a one-dimensional array on the base plate;
- and
- a ground plate coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate to form a beam blanker with each of the plurality of conductor pads.
1 more element
An apparatus comprising:
- a plurality of one-dimensional blanker arrays, each of the plurality of one-dimensional blanker arrays comprising a base plate, a plurality of conductor pads arranged in a one-dimensional array on the base plate, and a ground plate coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate to form a beam blanker with each of the plurality of conductor pads;
- and
- a plurality of beam sources, each of the plurality of beam sources coupled to a respective one of the one-dimensional blanker arrays to provide a beam line.
A method comprising:
- forming a plurality of conductor pads on a base plate, said plurality of conductor pads arranged in a one-dimensional array along the base plate;
- and
- coupling a ground plate to the base plate and over the plurality of conductor pads with a gap to form a beam blanker with each of the plurality of conductor pads.
A method comprising:
- receiving a beam at a one-dimensional blanker array, said one-dimensional blanker array comprising a base plate, a plurality of conductor pads arranged in a one-dimensional array on the base plate, and a ground plate coupled to the base plate over the plurality of conductor pads with a gap to form a beam blanker with each of the plurality of conductor pads;
- forming a beam line through the gap in the one-dimensional blanker array;
- and
- selectively applying voltage to the plurality of conductor pads to deflect corresponding segments of the beam line.
1 more element
A method comprising:
- receiving a beam at a one-dimensional blanker array, said one-dimensional blanker array comprising a base plate, a first array of conductor pads arranged in a one-dimensional array on the base plate, a second array of conductor pads arranged on the base plate aligned with the first array in series relative to a beam direction, and a ground plate coupled to the base plate over both the first array and the second array with a gap to form a beam blanker with each aligned pair of conductor pads;
- forming a beam line through the gap in the one-dimensional blanker array;
- detecting electrons emitted from a surface due to the beam line incident on the surface;
- and
- calibrating voltages applied to individual conductor pads of the first and second arrays based on intensities of the electrons corresponding to each aligned pair of conductor pads.
2 more elements
Dependencies are inferred from the claim text.