Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate

A substrate transfer apparatus for removing a substrate from a substrate accommodating tray accommodating the substrate in a horizontal state, the substrate transfer apparatus comprising:

• a tray holding unit for holding, in a horizontal state, at least one of a plurality of substrate accommodating trays stacked vertically;
• and
• a plurality of support pins for raising a substrate accommodated in a prescribed substrate accommodating tray which is released from the tray holding unit above the prescribed substrate accommodating tray,
• wherein:
• the plurality of substrate accommodating trays each include a plurality of openings through which the plurality of support pins are to be inserted, and
• the plurality of support pins are moved up relative to the prescribed substrate accommodating tray and are inserted through the plurality of openings of the prescribed substrate accommodating tray, so as to raise the substrate accommodated in the prescribed substrate accommodating tray.

A method for removing a substrate accommodated in each of a plurality of substrate accommodating trays stacked vertically, the method comprising the steps of:

• (a) placing the plurality of substrate accommodating trays each accommodating a substrate on an elevatable table;
• (b) holding, by a tray holding unit, at least one of a plurality of substrate accommodating trays each accommodating a substrate other than the lowest substrate accommodating tray among the plurality of substrate accommodating trays each accommodating a substrate;
• (c) lowering the elevatable table and inserting a plurality of support pins into a plurality of openings formed in the substrate accommodating tray placed on the elevatable table, thereby raising a substrate accommodated in the substrate accommodating tray placed on the elevatable table by the plurality of support pins;
• and
• (d) transferring the substrate raised by the plurality of support pins.

A method for accommodating a substrate in each of a plurality of substrate accommodating trays stacked vertically, the method comprising the steps of:

• (a) placing at least one substrate accommodating tray accommodating no substrate on an elevatable table and inserting a plurality of support pins into a plurality of openings formed in the at least one substrate accommodating tray;
• (b) placing a substrate on the plurality of support pins in a horizontal state;
• (c) raising the elevatable table and accommodating the substrate supported by the support pins in the highest substrate accommodating tray among the at least one substrate accommodating tray;
• and
• (d) holding the substrate accommodating tray, accommodating the substrate, by a tray holding unit.