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US 2004/0103913 A1Published application
Apparatus for washing glass substrates and process for producing a liquid crystal device
AssigneeCanon Kabushiki Kaisha
InventorMasaaki Suzuki
Life of this patent
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Abstract
Dirt, particularly of inorganic matter, attached to a substrate, such as a glass substrate for liquid crystal devices, is effectively removed by irradiating the substrate with ultraviolet rays including 184.9 nm and 253.7 nm in an oxygen-containing atmosphere in advance of wet cleaning with pure water. As a result, the wet cleaning time and the amount of pure water can be reduced.
Claims16
A method of cleaning a substrate for removing dirt on the substrate, comprising:
- irradiating a substrate surface with ultraviolet rays including wavelengths of 184.9 nm and 253.7 nm in an oxygen-containing atmosphere, and then subjecting the substrate to wet cleaning with pure water.
Dependencies are inferred from the claim text.