Air blower apparatus for use in inspection apparatus and inspection apparatus housing with the air blower apparatus
AssigneeAgilent Technologies, Inc.
InventorsNorio Nakano, Eiji Ishimoto, Yusuke Fujitani
Life of this patent
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AssigneeAgilent Technologies, Inc.
InventorsNorio Nakano, Eiji Ishimoto, Yusuke Fujitani
Estimating the term…
An air blower apparatus for use in an inspection apparatus includes an air blowing device for blowing air via an air filter to a recording medium and a recording apparatus. The air blowing device includes a fan unit provided above the recording medium, and a fan unit housing provided above the fan unit. The fan unit housing includes a first buffer space having an inlet port directed substantially downwardly toward the recording medium, and the first buffer space temporarily accumulates air inhaled from the inlet port. The fan unit inhales air from the inlet port that faces the first buffer space, discharges inhaled air at a substantially constant air flow rate to deliver the air via an air filter from an outlet port to the recording medium by a fan, and the discharged air is reflected on the recording medium and returns to the inlet port.
An air blower apparatus for use in an inspection apparatus, said air blower apparatus comprising an air blowing device for blowing air via an air filter to a recording medium being measured and to a recording apparatus for recording data on the recording medium,
An inspection apparatus housing comprising:
Dependencies are inferred from the claim text.