System for enhanging apparatus productivity and method thereof
AssigneeTokyo Electron Limited
InventorWataru Karasawa
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Abstract
There is provided a system and method for improving productivity of apparatuses. A vendor-side computer 26 obtains operating state data obtained by a monitoring device 18 provided in an apparatus 10 via a communication line 100, and monitors the operating state of the apparatus 10 from a remote location. Maintenance data at a part replacing time is transmitted from the apparatus 10, and the vendor-side computer 26 that has received maintenance data calculates an optimal replacement period of a part based on this. The calculated optimal replacement period of each part is sent to a plant 101. The plant 101 feeds the optimal replacement period back to the operation of the apparatus 10, so that productivity can be improved.
Claims36
A system, which is a system (26) that monitors an apparatus (10) from a remote location to improve its productivity, comprising,
- receiving means (28), which is connected to the apparatus (10) via communication, for receiving operation information indicating an operating state of the apparatus (10);
- and
- monitoring means (27) for monitoring said apparatus (10) based on operation information received by said receiving means (28).
A system comprising:
- an apparatus (10) including sensor means (18) for obtaining its own operation information and transmitting means (15) for transmitting operation information obtained by said sensor means (18);
- and
- a monitoring device (26) including receiving means (28), which is connected to the apparatus (10) via communications (100), for receiving operation information transmitted by said transmitting means (15) of the apparatus (10), and monitoring means (27) for monitoring said apparatus (10) based on operation information received by said receiving means (28).
A method, which is a method for monitoring an apparatus from a remote location to improve its productivity, comprising the steps of:
- receiving operation information indicating an operating state of the apparatus from the apparatus via communication;
- and
- monitoring the apparatus based on operation information received by said receiving step.
Dependencies are inferred from the claim text.