Dual mode hybrid control and method for CMP slurry

A method for controlling transport of a fluid through a conduit, comprising the steps of:

• providing a pump in fluid communication with said conduit;
• providing a flowmeter in said conduit;
• operably connecting a linear table to said pump;
• operably connecting a controller to said pump and said flowmeter;
• controlling said pump through said linear table in a first mode of operation to initiate flow of the fluid to a specified target rate range by sending a flow set value signal to said linear table and transmitting a first output control signal from said linear table to said pump;
• and
• controlling said pump through said controller in a second mode of operation to maintain said flow of the fluid within said specified target rate range by transmitting a measurement value signal from said flowmeter to said controller and transmitting a second output control signal from said controller to said pump.

A system for controlling transport of a fluid, comprising:

• a conduit for transporting the fluid;
• a pump provided in fluid communication with said conduit;
• a linear table operably connected to said pump for receiving a flow set value signal and operating said pump in a first mode of operation;
• a flowmeter provided in said conduit for monitoring flow of the fluid through said conduit;
• and
• a controller operably connected to said flowmeter and said pump for receiving a measurement value signal from said flow meter and receiving said flow set value signal and operating said pump in a second mode of operation.