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US 2004/0072097 A1Published application
Photosensitive composition and acid generator
AssigneeFuji Photo Film Co., Ltd.
InventorKunihiko Kodama
Life of this patent
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Abstract
A photosensitive composition of the present invention has excellent sensitivity and pattern profile, which comprises an acid generator having a specific structure.
Claims15
A photosensitive composition comprising a compound capable of generating an acid upon irradiation with an actinic ray, the compound being represented by the following general formula (I):
- 176
- wherein R1 represents an alkyl group;
- R2 represents a hydrogen atom, an alkyl group, or an aryl group;
- Y represents an alkyl group;
- Y1 and Y2 may be the same or different and each represents an alkyl group, an aryl group, an aralkyl group, or a hetero atom-containing aromatic group;
- R1 and R2 may be bonded to each other to form a ring;
- R2 and Y may be bonded to each other to form a ring;
- Y1 and Y2 may be bonded to each other to form a ring;
- two or more structures of the general formula (I) may be bonded to each other at any position of R1, R2 or Y, or Y1 or Y2 via a connecting group;
- and
- X− represents a non-nucleophilic anion.
8 more elements
A positive photosensitive composition comprising:
- (A) a compound capable of generating an acid upon irradiation with an actinic ray, the compound being represented by the following general formula (I);
- and
- (B) a resin that is decomposed by the action of an acid to increase its solubility in an alkaline developer:
- 177
- wherein R1 represents an alkyl group;
- R2 represents a hydrogen atom, an alkyl group, or an aryl group;
- Y represents an alkyl group;
- Y1 and Y2 may be the same or different and each represents an alkyl group, an aryl group, an aralkyl group, or a hetero atom-containing aromatic group;
- R1 and R2 may be bonded to each other to form a ring;
- R2 and Y may be bonded to each other to form a ring;
- Y1 and Y2 may be bonded to each other to form a ring;
- two or more structures of the general formula (I) may be bonded to each other at any position of R1, R2 or Y, or Y1 or Y2 via a connecting group;
- and
- X− represents a non-nucleophilic anion.
11 more elements
A positive photosensitive composition comprising:
- (A) a compound capable of generating an acid upon irradiation with an actinic ray, the compound being represented by the following general formula (I);
- (D) an alkaline developer-soluble resin;
- and
- (C) a dissolution inhibiting compound having a molecular weight of not more than 3,000, which is decomposed by the action of an acid to increase its solubility in an alkaline developer:
- 178
- wherein R1 represents an alkyl group;
- R2 represents a hydrogen atom, an alkyl group, or an aryl group;
- Y represents an alkyl group;
- Y1 and Y2 may be the same or different and each represents an alkyl group, an aryl group, an aralkyl group, or a hetero atom-containing aromatic group;
- R1 and R2 may be bonded to each other to form a ring;
- R2 and Y may be bonded to each other to form a ring;
- Y1 and Y2 may be bonded to each other to form a ring;
- two or more structures of the general formula (I) may be bonded to each other at any position of R1, R2 or Y, or Y1 or Y2 via a connecting group;
- and
- X− represents a non-nucleophilic anion.
12 more elements
A negative photosensitive composition comprising:
- (A) a compound capable of generating an acid upon irradiation with an actinic ray, the compound being represented by the following general formula (I);
- (D) an alkaline developer-soluble resin;
- and
- (E) an acid crosslinking agent capable of crosslinking with the alkaline developer-soluble resin by the action of an acid:
- 179
- wherein R1 represents an alkyl group;
- R2 represents a hydrogen atom, an alkyl group, or an aryl group;
- Y represents an alkyl group;
- Y1 and Y2 may be the same or different and each represents an alkyl group, an aryl group, an aralkyl group, or a hetero atom-containing aromatic group;
- R1 and R2 may be bonded to each other to form a ring;
- R2 and Y may be bonded to each other to form a ring;
- Y1 and Y2 may be bonded to each other to form a ring;
- two or more structures of the general formula (I) may be bonded to each other at any position of R1, R2 or Y, or Y1 or Y2 via a connecting group;
- and
- X− represents a non-nucleophilic anion.
12 more elements
An acid generator represented by the following general formula (I):
- 180
- wherein R1 represents an alkyl group;
- R2 represents a hydrogen atom, an alkyl group, or an aryl group;
- Y represents an alkyl group;
- Y1 and Y2 may be the same or different and each represents an alkyl group, an aryl group, an aralkyl group, or a hetero atom-containing aromatic group;
- R1 and R2 may be bonded to each other to form a ring;
- R2 and Y may be bonded to each other to form a ring;
- Y1 and Y2 may be bonded to each other to form a ring;
- two or more structures of the general formula (I) may be bonded to each other at any position of R1, R2 or Y, or Y1 or Y2 via a connecting group;
- and
- X− represents a non-nucleophilic anion.
8 more elements
Dependencies are inferred from the claim text.