Micropattern forming material and fine structure forming method

A method for forming a fine structure, comprising:

• a first step of forming a resist pattern capable of supplying an acid on a support or a thin film formed on a support;
• a second step of coating a micropattern forming material onto said resist pattern to form a micropattern forming film;
• a third step of supplying said acid from said resist pattern to cause a crosslinking reaction at a portion of said micropattern forming film contacting with said resist pattern to form a water or alkali-insoluble film;
• and
• a forth step of removing a water or alkali-soluble portion of said micropattern forming film:
• wherein said micropattern forming material comprises;
• a water-soluble component consisting of at least one selected from the group comprising water-soluble monomers, water-soluble oligomers, copolymers of water-soluble monomers and salts thereof, having a functional group reactable with a carboxyl group, and water and/or an organic solvent miscible with water.