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US 2004/0071875 A1Published application
Yttrium-doped bismuth titanate thin film and preparation thereof
AssigneePostech Foundation
InventorsShi-Woo Rhee, Sang-Woo Kang
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Abstract
A bismuth yttrium titanate (BYT) film having the composition of formula (I) has enhanced residual polarization and electric fatigue properties with excellent ferroelectric property, and therefore, it can be advantageously used in an electric or electronic device including a FRAM device: Bi4−xYxTi3O12 (I) wherein x is an integer of 0.1 to 2.
Claims9
A bismuth yttrium titanate (BYT) thin film having the composition of formula (I):
- Bi4−xYxTi3O12 (I)
- wherein x is an integer of 0.1 to 2.
Dependencies are inferred from the claim text.