Drive circuit for mems device and method of operation thereof
AssigneesAgere Systems Guardian Corp., Lucent Technologies Inc.
InventorsMarek M. Furyk, Khanh C. Nguyen, Andrew P. Sabol, Xiaoqing Yin
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Abstract
A drive circuit for a MEMS device, an integrated circuit having a plurality of MEMS devices and drivers, a method of operating the drive circuit and a method of manufacturing the integrated circuit. In one embodiment, the drive circuit includes: (1) an electrode driver and (2) a switching network, coupled to an output of said electrode driver that: (a) in a first configuration, couples said output to a first electrode of an axis of said MEMS device and grounds an opposing second electrode of said axis of said MEMS device and (b) in a second configuration, couples said output to said second electrode and grounds said first electrode.
Claims18
A drive circuit for a MEMS device, comprising:
- an electrode driver;
- and
- a switching network, coupled to an output of said electrode driver that:
- in a first configuration, couples said output to a first electrode of an axis of said MEMS device and grounds an opposing second electrode of said axis of said MEMS device, and
- in a second configuration, couples said output to said second electrode and grounds said first electrode.
A method of driving a MEMS device, comprising:
- assuming a first configuration in which an output of an electrode driver is coupled to a first electrode of an axis of said MEMS device and an opposing second electrode of said axis of said MEMS device is grounded;
- and
- assuming a second configuration in which said output is coupled to said second electrode and said first electrode is grounded.
An integrated circuit, comprising:
- a plurality of MEMS devices each having first and second axes of tilt;
- and
- a corresponding plurality of drive circuits, each comprising:
- first and second electrode drivers,
- a first switching network, coupled to an output of said first electrode driver that alternatively drives opposing first and second electrodes of a first axis of one of said plurality of MEMS devices, and
- a second switching network, coupled to an output of said second electrode driver that alternatively drives opposing third and fourth electrodes of a second axis of said one of said plurality of MEMS devices.
A method of manufacturing an integrated circuit, comprising:
- fabricating a plurality of MEMS devices each having first and second axes of tilt;
- and
- forming a corresponding plurality of drive circuits, each comprising:
- first and second electrode drivers,
- a first switching network, coupled to an output of said first electrode driver that alternatively drives opposing first and second electrodes of a first axis of one of said plurality of MEMS devices, and
- a second switching network, coupled to an output of said second electrode driver that alternatively drives opposing third and fourth electrodes of a second axis of said one of said plurality of MEMS devices.
Dependencies are inferred from the claim text.