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US 2004/0070697 A1Published application
Method of forming an active matrix display
AssigneeKopin Corporation
InventorsDuy-Phach Vu, Brenda D. Dingle, Jason E. Dingle, Ngwe Cheong
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Abstract
The invention relates to the formation of arrays of thin film transistors (TFT's) on silicon substrates and the dicing and tiling of such substrates for transfer to a common module body. TFT's activate display electrodes formed adjacent the transistors after the tiles have been transferred.
Claims6
A method of fabricating an active matrix display comprising:
- forming a silicon layer over an insulating layer and a supporting substrate;
- forming an array of transistors with the silicon layer to form an active matrix circuit on the supporting substrate;
- forming an array of pixel electrodes with a polycrystalline silicon material;
- and
- transferring the array of transistors and the array of pixel electrodes to a second substrate.
2 more elements
Dependencies are inferred from the claim text.