Droplet discharge device and liquid filling method therefor, and device manufacturing apparatus, device manufacturing method and device
AssigneeSeiko Epson Corporation
InventorsTakahiro Usui, Hirofumi Teramae, Satoru Hosono
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Abstract
A droplet discharge device is provided which can maintain predetermined liquid discharge characteristics even in the case where a drawing liquid of a high viscosity is used. A droplet discharge device which discharges liquid filled into a droplet discharge head, has a filling apparatus which switches between a first liquid and a second liquid of a lower viscosity than the first liquid, and fills the droplet discharge head.
Claims48
A droplet discharge device which discharges liquid filled into a droplet discharge head, having a filling apparatus which switches between a first liquid and a second liquid of a lower viscosity than said first liquid, and fills said droplet discharge head.
A liquid filling method for a droplet discharge device which fills a first liquid into a droplet discharge head of a droplet discharge device which discharges a liquid filled into said droplet discharge head, comprising the steps of:
- filling a second liquid of a lower viscosity than said first liquid into said droplet discharge head;
- and
- replacing said second liquid which has been filled into said droplet discharge head with said first liquid.
Dependencies are inferred from the claim text.