Apparatus and method for determining the performance of micromachined or microelectromechanical devices (MEMS)

A method of determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device), capable of carrying a high frequency signal having an intended working frequency, and comprising a capacitive structure with at least one movable part, comprising:

• providing a voltage signal;
• applying the voltage signal to at least one voltage divider circuit comprising, an impedance, an outlet and the capacitive structure;
• and
• detecting and measuring the voltage at the outlet of the voltage divider;
• wherein the voltage signal is a combined voltage signal of an actuation voltage able to act on the moveable part of the capacity structure with an actuation frequency and a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

An apparatus for determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device) intended to carry a high frequency signal having an intended working frequency, the device comprising a capacitive structure with at least one movable part, the apparatus comprising:

• a voltage signal source;
• at least one voltage divider circuit comprising, in series with the voltage signal source, an impedance, an outlet and the capacitive structure;
• and
• a detection unit configured to detect and measure the voltage at the outlet of the voltage divider;
• wherein the detection unit is configured to provide a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

A test system for a micromachined or microelectromechanical systems (MEMS) device configured to transmit high frequency signals, comprising:

• a voltage signal source,
• at least one voltage divider circuit, connected in series with the voltage signal source, and being connectable to a MEMS device;
• and
• a detection unit configured to detect and measure the voltage output by the voltage divider;
• wherein the detection unit is configured to provide a combined voltage signal of an actuation voltage capable of the actuating the MEMS and of a measurement voltage.