# US 2004/0070387 A1 · Water staging platform

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- Number: US 2004/0070387 A1
- Document ID: US20040070387A1
- Status: Published application
- Kind: A1
- Application number: 10/622,849
- Filed: 2003-07-18
- Published: 2004-04-15
- Earliest claimed: 2002-07-18
- Assignees: August Technology Corp.
- Inventors: Craig K. Carlson-Stevermer
- Web page: https://patentgrep.com/patent/US20040070387A1

## CPC

- H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection}
- H10P 72/3304: {characterised by movements or sequence of movements of transfer devices}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A wafer staging platform for use with equipment such as an inspection system for inspecting of semiconductors or like substrates. The platform is designed to reduce the amount of time needed to exchange wafers on a processing tool.

## Claims

### Claim 1

A wafer staging platform for a wafer inspection system comprising:
a first platform for holding a first wafer;
a second platform aligned with the first platform, the second platform for holding a second wafer;
wherein the first and second platforms are in close proximity to a processing platform.

### Claim 2 (depends on 1)

The wafer staging platform of claim 1, wherein the first wafer has not been processed.

### Claim 3 (depends on 1)

The wafer staging platform of claim 1, wherein the second wafer has been processed.

### Claim 4 (depends on 1)

The wafer staging platform of claim 1, further comprising:
a vacuum system for holding the first wafer on the first platform and the second wafer on the second platform.

### Claim 5

A handling system for a wafer inspection system comprising:
a wafer processing platform;
a wafer staging platform; and
a robot configured to move wafers between the wafer processing platform and the wafer staging platform.

### Claim 6 (depends on 5)

The handling system of claim 5, further comprising:
a loadport for storing a plurality of wafers;
wherein the robot moves the wafers between the loadport and the staging platform.

### Claim 7 (depends on 6)

The handling system of claim 6, wherein the loadport comprises a wafer cassette for storing a plurality of wafers.

### Claim 8 (depends on 5)

The handling system of claim 5, further comprising:
a pre-aligner for aligning wafers prior to inspection;
wherein the robot moves the wafers between the pre-aligner and the staging platform.

### Claim 9 (depends on 5)

The handling system of claim 5, wherein the staging platform comprises at least two platforms each for holding a wafer.

### Claim 10 (depends on 5)

The handling system of claim 5, wherein the staging platform comprises a vacuum system for holding wafers in place on the staging platform.

### Claim 11 (depends on 5)

The handling system of claim 5, further comprising:
a sensor to determine if a wafer is present on the staging platform.

### Claim 12 (depends on 11)

The handling system of claim 11, wherein the staging platform comprises the sensor.

### Claim 13 (depends on 11)

The handling system of claim 11, wherein the sensor comprises an optical sensor.

### Claim 14 (depends on 11)

The handling system of claim 11, wherein the sensor comprises a vacuum sensor.

### Claim 15

A method for swapping samples in a wafer inspection system comprising:
providing a sample processing platform;
providing a first and second sample holder in close proximately to the sample processing platform;
providing a robot to move samples between the sample processing platform and the first and second sample holders;
moving a first sample from the sample processing platform to the first sample holder; and
moving a second sample from the second sample holder to the sample processing platform.

### Claim 16 (depends on 15)

The method of claim 15, further comprising:
providing a loadport; and
moving the first sample from the first sample holder to the loadport.

### Claim 17 (depends on 16)

The method of claim 16, further comprising:
providing a pre-aligner; and
moving a third sample from the loadport to the pre-aligner.

### Claim 18 (depends on 16)

The method of claim 16, wherein moving the first sample from the first sample holder to the loadport occurs while the second sample is being processed on the processing platform.

### Claim 19 (depends on 17)

The method of claim 17, wherein moving the third sample from the loadport to the pre-aligner occurs while the second sample is being processed on the processing platform.

### Claim 20 (depends on 17)

The method of claim 17, further comprising:
moving the third sample from the pre-aligner to the second sample holder.

### Claim 21 (depends on 20)

The method of claim 20, wherein moving the third sample from the pre-aligner to the second sample holder occurs while the second sample is being processed on the processing platform.