Remote plasma generator

A remote plasma generator receives an alternating current source supplied from an alternating current power, ionizes process gas supplied from a gas source, generates plasma gas, and remotely supplies the generated gas to a process chamber, said remote plasma generator comprising:

• a main body including a gas inlet connected to the gas source and a gas outlet connected to the process chamber;
• a ring-shaped core connected to said main body by two parallel-aligned openings penetrating said main body;
• a vertical connector formed between the two parallel-aligned openings of said main body with upper and lower surfaces insulated from said main body by insulators;
• and
• an inductor coil wound on said ring-shaped core and including one end connected to the upper surface of said vertical connector and the other end connected to the lower surface of said vertical connector accommodating to use said vertical connector as a line extended from said ring-shaped core.

A remote plasma generator, comprising:

• a main body including a gas inlet connected to a gas source and a gas outlet connected to a process chamber;
• a ring-shaped core being installed within said main body;
• a connection pipe connecting an outer surface of said main body to an inner surface of said main body;
• and
• an inductor coil wound on said ring-shaped core and exposed to the outside of said main body via said connection pipe accommodating an electrical connection to an alternating current power.

A method of making of a remote plasma generator, comprising:

• forming a main body including a gas inlet connected to a gas source and a gas outlet connected to a process chamber;
• installing a ring-shaped core within said main body;
• forming a connection pipe connecting an outer surface of said main body to an inner surface of said main body;
• and
• installing an inductor coil wound on said ring-shaped core and exposed to the outside of said main body via said connection pipe accommodating an electrical connection to an alternating current power.