Electric motors with reduced stray magnetic fields
AssigneeNikon Corporation
InventorMichael R. Sogard
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AssigneeNikon Corporation
InventorMichael R. Sogard
Estimating the term…
A linear electric motor (10) including a magnet component (12), a conductor component (14) that interacts with the magnet component (12) and a control system (15) for directing current to the conductor component (14) is provided herein. Uniquely, the conductor component (14) minimizes the total stray magnetic fields generated by the conductor component (14), without significantly influencing the dynamic performance of the motor (10). Because of the conductor component (14) provided herein, the motor (10) is particularly useful in manufacturing, measurement and/or inspection processes that are sensitive and/or influenced by stray AC magnetic fields. More specifically, the present invention is particularly useful with an exposure apparatus (18) that utilizes an illumination system (24) that generates a charged particle beam, such as an electron beam.
A conductor component for a motor, the motor including a magnet component, the conductor component comprising:
A brushless electric motor comprising:
A method for manufacturing a brushless electric motor, the method comprising the steps of:
Dependencies are inferred from the claim text.