Micromirror systems with side-supported mirrors and concealed flexure members
AssigneeExajoule LLC
InventorChristopher M. Aubuchon
Life of this patent
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Abstract
Micromirror devices, especially for use in digital projection are disclosed. Other applications are contemplated as well. The devices employ a superstructure that includes a mirror supported over a hinge set above a substructure. Various improvements to the superstructure over known micromirror devices are provided. The features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein, possibly offering cost savings, lower power consumption, and higher resolution.
Claims18
A micromirror device comprising:
- a substrate with electrical components including address circuitry, and
- an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror supported by and spaced apart from said substrate by only a pair of mirror supports positioned between opposite portions of said mirror and opposite portions of a hinge comprising at least one torsion member, said hinge located beneath said mirror and supported above said substrate by at least one hinge support between ends of said hinge.
A method of producing a micromirror device comprising a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements comprising, a mirror supported by and spaced apart from said substrate, a plurality of hinge portions and a plurality of electrodes, said method comprising:
- forming mirror support precursors between adjacent mirror precursors regions, said mirror support precursors being attached to said hinge portions, and
- etching said mirror support precursors apart and said mirrors precursor regions apart, forming a plurality mirrors and mirror supports.
Dependencies are inferred from the claim text.