Back to results
US 2004/0069952 A1Published application
Beam adjusting sample, beam adjusting method and beam adjusting device
AssigneePioneer Corporation
InventorsMasahiro Katsumura, Yoshiaki Kojima, Yasumitsu Wada, Hiroaki Kitahara
Life of this patent
Estimating the term…
Abstract
A beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other is employed. A beam is applied to the beam adjusting sample to detect an amount of the beam passing through the beam adjusting sample. The beam vertically scans the two edges.
Claims16
A beam adjusting method comprising:
- applying a beam onto a beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each o the r;
- and
- detecting the amount of beam passing through the beam adjusting sample;
- wherein the beam vertically scans the two edges.
1 more element
A beam adjusting sample including a flat surface being like a plate and has two edges orthogonal to each other.
A beam adjusting device comprising:
- a stage for laying a beam adjusting sample having a flat surface being like a plate and having two edges orthogonal to each other;
- a beam generator for applying a beam onto the beam adjusting sample;
- a secondary electron detector for detecting a secondary electron generated by applying the beam;
- a position detector for detecting the position of the beam adjusting sample;
- and
- a beam detector disposed under the stage,
- wherein the beam detector detects an amount of electron beam passing through the beam adjusting sample.
4 more elements
Dependencies are inferred from the claim text.