Balanced momentum probe holder
AssigneeVeeco Instruments Inc.
InventorJames R. Massie
Life of this patent
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Abstract
A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.
Claims27
Apparatus having a probe for interacting with a surface of a sample, wherein the apparatus comprises:
- a Z actuator assembly having first and second extendable and retractable members, wherein the probe is attached to and moved by the first member;
- the second member oriented and arranged on the Z actuator assembly with respect to the first member to synchronously move in a direction opposite that of movement of the first member such that a net momentum of the Z actuator is substantially zero upon actuation of the first and second members.
Apparatus for measuring a surface of a sample, the apparatus comprising:
- a scanning member having an X actuator, a Y actuator, and a Z actuator;
- and
- opposed first and second members mounted on the Z actuator, each of which is extendable and retractable in the Z direction, wherein the second member is operated to balance a momentum of the first member when the first member is extended and retracted.
The apparatus as defined in claim l, wherein the X, Y, and Z actuators comprise one of a scanning tube and a scanning flexure.
Apparatus having an actuator for characterizing a surface of a sample with a probe, the actuator being extensible and retractable in a direction either toward or away from the surface, the apparatus comprising:
- a common central support carried by the actuator;
- a first member carried by the common central support and having a distal end which is extensible and retractable in a direction either toward or away from the surface;
- a second member carried by the common central support and having a distal end which is extensible and retractable in a direction either toward or away from the surface, wherein the distal ends of the first and second members substantially synchronously either both extend or both retract.
A method of reducing parasitic oscillations in an apparatus having a fast Z actuator coupled to a slow Z actuator, the fast Z actuator moving a probe which interacts with the surface of a sample, the method comprising the steps of:
- balancing a momentum of the fast Z actuator, the momentum being generated when the fast Z actuator moves the probe relative to the surface, with an equal and opposite momentum synchronously generated in the fast Z actuator.
Dependencies are inferred from the claim text.