Stopper rod and cassette using the same
OwnerChun-Kai Huang, Ming-Hui Changinventors
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Abstract
This invention relates to a cassette (1) for supporting substrates and includes a pair of frames (2) opposite each other, at least two supporting bodies (3) arranged opposite each other between the frames, and at least a stopper rod (4) arranged between the frames. The frames, the supporting bodies and the stopper rods define a space for accommodating the substrates, and each stopper rod includes a metal rod (40) and a resin layer (42). The resin layer forms a coating on the metal rod, forming a unit.
Claims9
A cassette for supporting substrates, comprising:
- a pair of frames opposite each other,
- at least two supporting bodies arranged opposite each other between the frames, and
- at least a stopper rod arranged between the frames,
- wherein the frames, the supporting bodies and the stopper rods define a space for accommodating substrates, and each stopper rod comprises a metal rod and a resin layer, and the resin layer coats the metal rod, forming a unit of the metal rod and resin layer.
A stopper rod of a cassette for accommodating substrates, comprising:
- a metal rod, and
- a resin layer,
- wherein the resin layer coats the metal rod, forming a unit of the metal rod and resin layer.
A cassette for supporting substrates, comprising:
- a pair of frames opposite each other,
- at least two supporting bodies arranged opposite each other between the frames to from restriction in a first horizontal direction, and
- at least a stopper rod disposed beside said supporting bodies to form restriction in a second horizontal direction perpendicular to said first horizontal direction;
- wherein each of said stopper rods comprises a metal rod and a resin layer, and the resin layer coaxially enclosing the metal rod, forming a unitary piece of the metal rod and resin layer without any gap therebetween so that water can not axially invade an interior of said resin layer and exterior of the metal rod.
Dependencies are inferred from the claim text.