Electrochemical method and system for monitoring hydrogen peroxide concentration in slurries

Abstract

Electrochemical monitoring system and method are provided for online determination of hydrogen peroxide concentration in slurries, e.g., a chemical mechanical polishing slurry. The monitoring system includes an electrochemical cell fluidly coupled to receive a slurry including hydrogen peroxide. The cell includes at least a working electrode made up of tungsten, a reference electrode and a counter electrode. The system further includes a potentiostat electrically coupled to the working electrode to supply a desired potentials in increments to the working electrode and measure current flow between the working electrode and the counter electrode. The amount of passive current established between the working electrode and the counter electrode over a selected time window is indicative of the concentration of hydrogen peroxide in the slurry.

Dependencies are inferred from the claim text.