Loading patent…
AssigneeAdvanced Technology Materials, Inc.
InventorsJose I. Arno, W Karl Olander
Estimating the term…
A system for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen compounds XFn (wherein X is Cl, Br, or I, and n is an odd integer). Such system comprises a fluorine source, a halogen source for supplying halogen species other than fluorine, a chamber for mixing fluorine with halogen species other than fluorine, and an energy source to supply energy to such chamber to facilitate reaction between fluorine and the halogen species other than fluorine. The chamber may be a semiconductor processing chamber, wherein the in situ generated fluorine radicals and/or fluorine-containing interhalogens are employed for cleaning the processing chamber.
An in-situ generation system of fluorine radicals and/or fluorine-containing interhalogen compounds for use in cleaning a processing chamber, said system comprising:
An apparatus for generating chlorine trifluoride for cleaning of a processing chamber, comprising:
An apparatus for generating chlorine trifluoride, comprising:
A method for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen compounds for use in cleaning a processing chamber, comprising the steps of:
A method of generating chlorine trifluoride, for cleaning of a processing chamber, said method comprising the steps of:
A method for generating chlorine trifluoride, comprising the steps of:
A system for generating fluorine radicals and/or fluorine-containing interhalogen compounds, comprising a fluorine source, a halogen source for supplying at least one halogen species other than fluorine, an enclosure for mixing fluorine with said halogen species other than fluorine, and a photoenergy source for supplying photoenergy to said enclosure.
A method for generating fluorine radicals and/or fluorine-containing interhalogen compounds, comprising the steps of providing a fluorine source and a halogen source for supplying fluorine and at least one halogen species other than fluorine, mixing fluorine with said halogen species in an enclosure, and supplying photoenergy to said enclosure from a photoenergy source to facilitate generation of fluorine radicals and/or fluorine-containing interhalogen compounds.
Dependencies are inferred from the claim text.