Switch and method for manufacturing the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsNorisato Shimizu, Yoshito Nakanishi, Kunihiko Nakamura, Yasuyuki Naito
Life of this patent
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Abstract
Disclosed is a switch having a movable electrode to be separately driven downward and upward to secure signal transmission efficiency and insulation capability and operate for signal connection and disconnect at a high speed. The switch comprises a movable electrode, a fixed electrode positioned beneath the movable electrode, and a movable electrode driving fixed electrode positioned on both sides of the movable electrode with respect to a length wise direction thereof. Inside surfaces of the movable electrode, concave and convex parts are formed to arrange on both sides fixed electrodes having the corresponding concave and convex parts with a space.
Claims29
A switch comprising:
- a movable electrode;
- a first fixed electrode positioned on both sides Of the movable electrode with a predetermined gap;
- and
- a second fixed electrode positioned beneath the movable electrode with a predetermined gap to the movable electrode;
- wherein a plurality of convex and concave parts are provided at predetermined positions in a side surface of the movable electrode;
- a plurality of concave and convex parts are provided in the first fixed electrode respectively corresponding to the convex and concave parts in the side surface of the movable electrode;
- the convex parts formed in the side surface of the movable electrode being arranged in a manner surrounded by the concave parts formed in the first fixed electrode;
- and
- the convex parts of the first fixed electrode being arranged in a manner surrounded by the concave parts in the side surface of the movable electrode.
A method for manufacturing a switch comprising:
- a step of forming a silicon oxide film on a substrate;
- a step of forming a metal on the silicon oxide film;
- a step of dry-etching the silicon oxide film on the metal;
- a step of etching the metal to form an electrode-to-electrode isolating silicon oxide film;
- and
- a step of forming a movable electrode having convex and concave parts on a side surface, and a fixed electrode for driving the movable electrode having concave and convex parts, opposed to said convex and concave parts of the movable electrode, on a side surface on a same sacrificial layer.
A method for manufacturing a switch at least comprising:
- a step of forming a silicon oxide film on a substrate;
- a step of forming a metal on the silicon oxide film;
- a step of dry-etching the silicon oxide film on the metal;
- a step of etching the metal to form an electrode-to-electrode isolating silicon oxide film;
- and
- a step of forming a step moderating pattern in a predetermined position of a side surface of a signal transmitting fixed electrode.
Dependencies are inferred from the claim text.