# US 2004/0069408 A1 · Dual-port end point window for plasma etcher > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2004/0069408 A1 - Document ID: US20040069408A1 - Status: Published application - Kind: A1 - Application number: 10/267,574 - Filed: 2002-10-09 - Published: 2004-04-15 - Earliest claimed: 2002-10-09 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Inventors: Ping-Jen Cheng; Huan-Liang Tzeng; Jung-Hsiang Chang - Web page: https://patentgrep.com/patent/US20040069408A1 ## CPC - H01J 37/32458: {Vessel} - H01J 37/32963: {End-point detection} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A dual-port endpoint detection window for a process chamber for substrates. The dual-port endpoint detection window of the present invention comprises a primary port and a secondary port each of which may be individually removably fitted with a light sensor for the endpoint detection system. A cover is provided for removably covering the secondary port. After the window of the primary port has become covered with material deposition as a result of prolonged use of the process chamber, the secondary port is uncovered for use and the light sensor is attached to the secondary port for continued use of the endpoint detection system through the secondary port. ## Claims ### Claim 1 An end point detection window for a process chamber, comprising: at least two windows for mounting in the process chamber; at least two sensor ports provided adjacent to said at least two windows, respectively; and a cover provided adjacent to one of said at least two windows for selectively covering and uncovering said one of said at least two windows. ### Claim 2 (depends on 1) The end point detection window of claim 1 further comprising at least two window recesses for communication with the process chamber and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 3 (depends on 1) The end point detection window of claim 1 further comprising a window plate for engaging said process chamber and wherein said at least two windows are provided in said window plate. ### Claim 4 (depends on 3) The end point detection window of claim 3 further comprising at least two window recesses provided in said window plate for communication with the process chamber and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 5 (depends on 3) The end point detection window of claim 3 wherein said cover comprises a shaft for rotatably engaging said window plate, a window cover flange carried by said shaft for selectively covering said one of said at least two windows, and a shaft rotating mechanism engaging said shaft for selectively rotating said shaft. ### Claim 6 (depends on 5) The end point detection window of claim 5 further comprising at least two window recesses provided in said window plate for communication with the process chamber and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 7 (depends on 5) The end point detection window of claim 5 further comprising a flange cover carried by said window plate for covering said window cover flange when said window cover flange selectively covers said one of said at least two windows. ### Claim 8 (depends on 7) The end point detection window of claim 7 further comprising at least two window recesses provided in said window plate for communication with the process chamber and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 9 (depends on 1) The end point detection window of claim 1 wherein said at least two windows each comprises quartz. ### Claim 10 (depends on 9) The end point detection window of claim 9 further comprising at least two window recesses for communication with the process chamber and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 11 (depends on 9) The end point detection window of claim 9 further comprising a window plate for engaging said process chamber and wherein said at least two windows are provided in said window plate. ### Claim 12 (depends on 11) The end point detection window of claim 11 wherein said cover comprises a shaft for rotatably engaging said window plate, a window cover flange carried by said shaft for selectively covering said one of said at least two windows, and a shaft rotating mechanism engaging said shaft for selectively rotating said shaft. ### Claim 13 An end point detection window for a process chamber, comprising: a window plate having a primary window recess and a secondary window recess for mounting in the process chamber; a partition separating said primary window recess from said secondary window recess; a primary window provided in said primary window recess and a secondary window provided in said secondary window recess; a primary sensor port provided adjacent to said at primary window and a secondary sensor port provided adjacent to said secondary window; and a cover provided adjacent to said secondary window recess for selectively covering and uncovering said secondary window. ### Claim 14 (depends on 13) The end point detection window of claim 13 wherein said cover comprises a shaft for rotatably engaging said window plate, a window cover flange carried by said shaft for selectively covering said one of said at least two windows, and a shaft rotating mechanism engaging said shaft for selectively rotating said shaft. ### Claim 15 (depends on 13) The end point detection window of claim 13 wherein said primary window and said secondary window each comprises quartz. ### Claim 16 (depends on 13) The end point detection window of claim 13 further comprising a flange cover carried by said window plate for covering said window cover flange when said window cover flange selectively covers said one of said at least two windows. ### Claim 17 A process chamber comprising: a chamber wall defining a chamber interior; at least two windows provided in said chamber wall; at least two sensor ports provided in said chamber wall adjacent to said at least two windows, respectively; and a cover provided adjacent to one of said at least two windows for selectively covering and uncovering said one of said at least two windows. ### Claim 18 (depends on 17) The process chamber of claim 17 further comprising at least two window recesses provided in said chamber wall and communicating with said chamber interior, and wherein said at least two windows are recessed in said at least two window recesses, respectively. ### Claim 19 (depends on 17) The process chamber of claim 17 further comprising a window plate for engaging said process chamber and wherein said at least two windows are provided in said window plate. ### Claim 20 (depends on 19) The process chamber of claim 19 wherein said cover comprises a shaft for rotatably engaging said window plate, a window cover flange carried by said shaft for selectively covering and uncovering said one of said at least two windows, and a shaft rotating mechanism engaging said shaft for selectively rotating said shaft.